Design and Analysis of Extremely Low-Noise MEMS Gyroscopes for Navigation

Inertial measurement sensors that include three gyroscopes and three accelerometers are key elements of inertial navigation systems. Miniaturization of these sensors is desirable to achieve low manufacturing cost, high durability, low weight, small size, and low energy consumption. However, there is a tradeoff between miniaturization of inertial sensors and their performance. Developing all the necessary components for navigation using inertial sensors in a small volume requires major redesign and innovation in these sensors. The main goal of this research is to identify, analyze and optimize parameters that limit the performance of miniaturized inertial gyroscopes and provide comprehensive design guidelines for achieving multi-axis navigation-grade MEMS gyroscopes. It is shown that the fundamental performance limit of inertial gyroscopes is angle random walk (ARW) due to thermo-mechanical and electronic noises. Theoretical models show that resonant frequency, frequency mismatch between sensing and driving modes, effective mass, quality factor (Q), driving amplitude, sensing gap, sensing area and angular gain are the most important parameters that need to be optimized for best noise and most practical device design. In this research, two different structures are considered for low-noise MEMS gyroscopes: 1) shell gyroscopes in yaw direction, and 2) a novel super sensitive stacked (S3) gyroscope for pitch/roll directions. Extensive analytical and FEM numerical modeling was conducted throughout this research to investigate the mechanisms that affect Q and noise in shell resonators used in yaw-rate gyroscopes. These models provided insight into ways to significantly improve resonator design, structure, fabrication, and assembly and helped fabricate fused silica shells with Qs as high as 10 million (at least an order of magnitude larger than other similar shells). Noise performance of these fused silica shell gyroscopes with 5 mm dimeter improved by about two orders of magnitude (< 5×10-3 °/√hr), representing one of the best noise performances reported for a MEMS gyroscope. To build a high-performance MEMS-based planar vibratory pitch/roll gyroscope, it is critical to have a resonator with high Q in the out-of-plane resonant mode. Existing out-of-plane resonators suffer from low Q due to anchor loss or/and thermoelastic dissipation (TED). Increasing the thickness of the out-of-plane resonator reduces TED, but this increases the anchor loss. To reduce anchor loss significantly, a novel structure called S3 is designed. In this structure, two similar resonators are stacked on top of each other and move in opposite directions, thus providing a balanced stacked resonator with reduced anchor loss. The reduction of anchor loss allows larger thickness of silicon S3 gyroscopes, leading to a very low TED. A large-scale model of a stacked balanced resonator is fabricated and tested. The initial results show more than 50 times improvement in Q (measured in air) when resonators are stacked. It is expected that by testing this device in vacuum, Q would improve by more than three orders of magnitude. The S3 design also has an extremely large effective mass, a very large angular gain, a large driving amplitude, a very small sensing gap, and a large sensing area. It is estimated that a 500 µm thick silicon S3 gyroscope provides ARW of about 1.5×10-5 °/√hr (more than two orders of magnitude better performance than a navigation-grade gyroscope). This extraordinary small value can be improved for 1mm thick fused silica to 7.6×10-7 °/√hr if the technology for etching fused silica could be developed in the future.PHDElectrical and Computer EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttps://deepblue.lib.umich.edu/bitstream/2027.42/147701/1/darvishi_1.pd

IMECE2011-63108 ANALYTICAL SOLUTIONS FOR THE STATIC INSTABILITY OF MICRO/NANO MIRRORS UNDER THE COMBINED EFFECT OF CAPILLARY FORCE AND CASIMIR FORCE

ABSTRACT This paper deals with the problem of static instability of Micro/Nano mirrors under the combined effect of capillary force and Casimir force. At the First the governing equations of the statical behavior of Micro/Nano mirrors under the combined effect of capillary force and casimir force is obtained. The dependency of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that existence of casimir force can considerably reduce the stability limits of nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the casimir force applied to the mirror. Finally analytical tool Homotopy Perturbation Method (HPM) is utilized for prediction of the mirror&apos;s behaviour under combined capillary and casimir forces. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. Results of this paper can be used for successful fabrication of nano/micromirrors using wet etching process where capillary force plays a major role in the system.

IMECE2011-63112 CLOSED FORM SOLUTIONS FOR THE PROBLEM OF STATICAL BEHAVIOR OF NANO/MICROMIRRORS UNDER THE EFFECT OF CAPILLARY FORCE AND VAN DER WAALS FORCE

ABSTRACT The current paper deals with the problem of static instability of Micro/Nano mirrors under the combined effect of capillary force and van der Waals force. First the governing equations of the statical behavior of Micro/Nano mirrors under the combined effect of capillary force and casimir force is obtained using the newtons first law of motion. The dependence of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that existence of vdW torque can considerably reduce the stability limits of the nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the vdW toque applied to the mirror. Finally analytical tool Homotopy Perturbation Mehtod (HPM) is utilized for prediction of the nano/micromirror behaviour under combined capillary and vdW force. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. Results of this paper can be used for successful fabrication of nano/micromirrors using wet etching process where capillary force plays a major role in the system

INVESTIGATION OF THERMOELASTIC LOSS MECHANISM IN SHELL RESONATORS

ABSTRACT Maximizing quality (Q) factor is key to enhancing the performance of micro mechanical resonators, which are used in a wide range of applications such as gyroscopes, filters, and clocks. There are several energy loss mechanisms commonly associated with micro resonators including anchor loss through the substrate, squeeze film damping, thermoelastic dissipation (TED), and surface loss. This work focuses on the thermoelastic loss as one of the major energy dissipation mechanisms of micro shell resonators. In this article, the effects of material properties, thickness, conductive coating and operating temperature on the Q-factor of micro shell resonators are investigated. Numerical simulation shows shell resonators have higher Q-factors when they are operating at lower temperatures. Although, the magnitude of the simulated Q-factors of an uncoated bare resonator made from fused silica is more than 70 million and so it is too high to have a remarkable effect on the total Q-factor, our study shows that even a thin layer of some conductive coatings like gold on the surface of a bare shell reduces Q-factor significantly. The sensitivity of the coated shell resonator design to the TED phenomenon provides useful information for the development of new micro shell resonators with improved performance and Q-factors

Effect of metabolic genetic variants on long-term disease comorbidity in patients with type 2 diabetes

Underlying genetic determinants contribute to developing type 2 diabetes (T2D) future diseases. The present study aimed to identify which genetic variants are associated with the incident of the major T2D co-morbid disease. First, we conducted a discovery study by investigating the genetic associations of comorbid diseases within the framework of the Utrecht Cardiovascular Pharmacogenetic studies by turning information of > 25 years follow-up data of 1237 subjects whom were genotyped and included in the discovery study. We performed Cox proportional-hazards regression to examine associations between genetic variants and comorbid diseases including cardiovascular diseases (CVD), chronic eye disease, cancer, neurologic diseases and chronic kidney disease. Secondly, we replicated our findings in two independent cohorts consisting of 1041 subjects. Finally, we performed a meta-analysis by combining the discovery and two replication cohorts. We ascertained 390 (39.7%) incident cases of CVD, 182 (16.2%) of chronic eye disease, 155 (13.8%) of cancer, 31 (2.7%) of neurologic disease and 13 (1.1%) of chronic kidney disease during a median follow-up of 10.2 years. In the discovery study, we identified a total of 39 Single Nucleotide Polymorphisms (SNPs) associated with comorbid diseases. The replication study, confirmed that rs1870849 and rs8051326 may play a role in the incidence of chronic eye disease in T2D patients. Half of patients developed at least one comorbid disease, with CVD occurring most often and earliest followed by chronic eye disease. Further research is needed to confirm the associations of two associated SNPs with chronic eye disease in T2D

Effect of metabolic genetic variants on long-term disease comorbidity in patients with type 2 diabetes

Underlying genetic determinants contribute to developing type 2 diabetes (T2D) future diseases. The present study aimed to identify which genetic variants are associated with the incident of the major T2D co-morbid disease. First, we conducted a discovery study by investigating the genetic associations of comorbid diseases within the framework of the Utrecht Cardiovascular Pharmacogenetic studies by turning information of > 25 years follow-up data of 1237 subjects whom were genotyped and included in the discovery study. We performed Cox proportional-hazards regression to examine associations between genetic variants and comorbid diseases including cardiovascular diseases (CVD), chronic eye disease, cancer, neurologic diseases and chronic kidney disease. Secondly, we replicated our findings in two independent cohorts consisting of 1041 subjects. Finally, we performed a meta-analysis by combining the discovery and two replication cohorts. We ascertained 390 (39.7%) incident cases of CVD, 182 (16.2%) of chronic eye disease, 155 (13.8%) of cancer, 31 (2.7%) of neurologic disease and 13 (1.1%) of chronic kidney disease during a median follow-up of 10.2 years. In the discovery study, we identified a total of 39 Single Nucleotide Polymorphisms (SNPs) associated with comorbid diseases. The replication study, confirmed that rs1870849 and rs8051326 may play a role in the incidence of chronic eye disease in T2D patients. Half of patients developed at least one comorbid disease, with CVD occurring most often and earliest followed by chronic eye disease. Further research is needed to confirm the associations of two associated SNPs with chronic eye disease in T2D

CHARACTERIZATIO OF STATIC BEHAVIOR OF ELECTROSTATICALLY ACTUATED MICRO TWEEZERS USI G MODIFIED COUPLE STRESS THEORY

Abstract In this paper, static behavior and pull-in of micro tweezers is studied. The micro tweezer is modelled as two cantilever beams. Static behavior of the micro tweezer under the effect of electrostatic actuation is modelled using the Euler-Bernoulli beam theory. In order to capture size effects on the behavior of micro tweezers, modified couple stress theory is utilized. It is shown when the voltage between two electrodes increased from some specific value, micro beams adhere to each other and it is observed that the pull-in voltage predicted by the modified couple stress theory considerably differs with that of the classical theory of elasticity. Results of this paper can be used for accurate design, synthesis and optimization of micro tweezers

Effect of metabolic genetic variants on long-term disease comorbidity in patients with type 2 diabetes

Underlying genetic determinants contribute to developing type 2 diabetes (T2D) future diseases. The present study aimed to identify which genetic variants are associated with the incident of the major T2D co-morbid disease. First, we conducted a discovery study by investigating the genetic associations of comorbid diseases within the framework of the Utrecht Cardiovascular Pharmacogenetic studies by turning information of > 25 years follow-up data of 1237 subjects whom were genotyped and included in the discovery study. We performed Cox proportional-hazards regression to examine associations between genetic variants and comorbid diseases including cardiovascular diseases (CVD), chronic eye disease, cancer, neurologic diseases and chronic kidney disease. Secondly, we replicated our findings in two independent cohorts consisting of 1041 subjects. Finally, we performed a meta-analysis by combining the discovery and two replication cohorts. We ascertained 390 (39.7%) incident cases of CVD, 182 (16.2%) of chronic eye disease, 155 (13.8%) of cancer, 31 (2.7%) of neurologic disease and 13 (1.1%) of chronic kidney disease during a median follow-up of 10.2 years. In the discovery study, we identified a total of 39 Single Nucleotide Polymorphisms (SNPs) associated with comorbid diseases. The replication study, confirmed that rs1870849 and rs8051326 may play a role in the incidence of chronic eye disease in T2D patients. Half of patients developed at least one comorbid disease, with CVD occurring most often and earliest followed by chronic eye disease. Further research is needed to confirm the associations of two associated SNPs with chronic eye disease in T2D